HVEM/AFM Observation of Hinge-Type Plastic Zones Associated with Cracks in Silicon Crystals

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HVEM/AFM Observation of Hinge-Type Plastic Zones Associated with Cracks in Silicon Crystals

Dislocation structures developed in hinge-type plastic zones associated with cracks in silicon crystals have been studied using a high voltage electron microscope (HVEM). Fine slip bands due to those dislocations have been also examined by an atomic force microscope (AFM). {100} and {110} cracks were introduced into {110} silicon wafers at room temperature by Vickers indentation method. The tem...

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ژورنال

عنوان ژورنال: MATERIALS TRANSACTIONS

سال: 2002

ISSN: 1345-9678,1347-5320

DOI: 10.2320/matertrans.43.2169